Method for making semiconductor device

ABSTRACT

A first adhesive tape is attached to a first major surface of a semiconductor wafer, the semiconductor wafer having a plurality of semiconductor chip regions. Protrusion electrodes are formed on a second major surface of the semiconductor wafer within the plurality of semiconductor chip regions. Portions of the semiconductor wafer located between the plurality of chip regions are removed to form a plurality of semiconductor chip. Intervals between the semiconductor chips are then expanded. Respective first major surfaces of the wiring substrates are coupled to the corresponding second major surfaces of the semiconductor chips by the protrusion electrodes to form preliminarily structures each of which is comprised of the semiconductor chip and the wiring substrate. A second adhesive tape is attached to second major surfaces of the wiring substrates. The first adhesive tape from the semiconductor chips. A resin is applied to gaps between the semiconductor chips and the wiring substrates, and the second adhesive tape is removed from the wiring substrates to form the semiconductor devices.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates in general to a method for making a semiconductor device, and more particularly, to a method for making a semiconductor device having a flip chip configuration.

[0003] This application is a counterpart of Japanese patent application, Serial Number 94832/1999, filed Apr. 1, 1999, the subject matter of which is incorporated herein by reference.

[0004] 2. Description of the Related Art

[0005] As the integration density of IC chips continues to increase, the overall size of the IC chips tends to increase as well. On the other hand, as high density assembly of devices is the norm, it is still highly desirable that the packages for housing the increasingly larger IC chips be as small and thin as possible.

[0006] To this end, a semiconductor package called a “chip scale package” or “chip size package” (CSP) has been recently developed. The CSP is formed of a size which is similar to that of the IC chip.

[0007] A flip chip semiconductor device is one of the package types used to obtain a CSP configuration. The flip chip semiconductor device has a semiconductor chip and a package substrate which faces an active surface of the semiconductor chip and couples to the chip through bump electrodes formed on the active surface of the chip. The flip chip semiconductor device is mounted to a substrate, e.g., a printed circuit board.

[0008] Many manufacturing steps are needed to obtain the flip chip semiconductor device. Therefore, a manufacturing time period becomes long and a manufacturing cost (an assembling cost) tends to increase.

[0009] A need exists for an improved method for making a semiconductor device, and more specifically for an improved method for making a semiconductor device having a flip chip configuration.

SUMMARY OF THE INVENTION

[0010] It is an object of the present invention to provide a method for making a semiconductor device that may reduce manufacturing costs.

[0011] It is an object of the present invention to provide a method for making a semiconductor device that may reduce manufacturing steps.

[0012] It is another object of the present invention to provide a method of making a semiconductor device that may reduce a manufacturing time period.

[0013] According to one aspect of the present invention, for achieving the above object, there is provided a method for making a semiconductor device which includes attaching a first adhesive tape onto a first major surface of a semiconductor wafer, and wherein the semiconductor wafer has a plurality of semiconductor chip regions; forming protrusion electrodes on a second major surface of the semiconductor wafer within the plurality of semiconductor chip regions; removing portions of the semiconductor wafer located between the plurality of chip regions to form a plurality of semiconductor chips; expanding intervals between the semiconductor chips; coupling respective first major surfaces of wiring substrates to corresponding second major surfaces of the semiconductor chips by protrusion electrodes to form preliminarily structures each of which is comprised of the semiconductor chip and the wiring substrate; attaching a second adhesive tape onto second major surfaces of the wiring substrates; removing the first adhesive tape from the semiconductor chips; applying a resin to gaps between the semiconductor chips and the wiring substrates; and removing the second adhesive tape from the wiring substrates to form the semiconductor devices.

[0014] The above and further objects and novel features of the invention will more fully appear from the following detailed description, appended claims and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015]FIG. 1(A) through (D) are process diagrams showing a method for making a semiconductor device according to a first preferred embodiment of the present invention.

[0016]FIG. 2(A) through (D) are process diagrams showing a method for making a semiconductor device according to a first preferred embodiment of the present invention.

[0017]FIG. 3 is a plan view of FIG. 1(A).

[0018]FIG. 4 is a cross sectional view showing a semiconductor device according to a second preferred embodiment of the present invention.

[0019]FIG. 5(A) through (C) are process diagrams showing a method for making a semiconductor device according to a second preferred embodiment of the present invention.

[0020]FIG. 6(A) and (D) are process diagrams showing a method for making a semiconductor device according to a third preferred embodiment of the present invention.

[0021]FIG. 7 is a cross sectional view showing a semiconductor device according to a fourth preferred embodiment of the present invention.

[0022]FIG. 8(A) through (C) are process diagrams showing a method for making a semiconductor device according to a fourth preferred embodiment of the present invention.

[0023]FIG. 9(A) is one of process diagrams showing a method for making a semiconductor device according to a fifth preferred embodiment of the present invention.

[0024]FIG. 9(B) is a plan view showing an intermediate structure 64 a from a silicon wafer 10 side before dicing.

[0025]FIG. 10(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 b.

[0026]FIG. 10(B) is a cross sectional view of the semiconductor device of FIG. 10(A) taken along the line 10-10′.

[0027]FIG. 11(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 c.

[0028]FIG. 11(B) is a cross sectional view of the semiconductor device of FIG. 11(A) taken along the line 11-11′.

[0029]FIG. 12(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 d.

[0030]FIG. 12(B) is a cross sectional view of the semiconductor device of FIG. 12(A) taken along the line 12-12′.

[0031]FIG. 13(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 e.

[0032]FIG. 13(B) is a cross sectional view of the semiconductor device of FIG. 13(A) taken along the line 13-13′.

[0033]FIG. 14(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 f.

[0034]FIG. 14(B) is a cross sectional view of the semiconductor device of FIG. 14(A) taken along the line 14-14′.

[0035]FIG. 15(A) is a plan view from an external terminal surface 62 b side, which shows a resin sealed intermediate structure 64 g.

[0036]FIG. 15(B) is a cross sectional view of the semiconductor device of FIG. 145(A) taken along the line 15-15′.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] A method for making a semiconductor device according to the present invention will be explained hereinafter with reference to the figures.

[0038] The various configuration, sizes, and positions shown in figures are rough outlines that are intended to explain the present invention. However, characteristics such as numerical values and materials which are described later are merely examples. Therefore, the figures are not intended as a definition of the limits of the present invention.

[0039] In order to simplify explanations, like elements are given like or corresponding reference numerals through this specification and figures. Thus, dual explanations of the same elements are avoided.

First Preferred Embodiment

[0040]FIG. 1(A) through (D) and FIG. 2(A) through (D) are process diagrams showing a method for making a semiconductor device according to a first preferred embodiment of the present invention. FIG. 3 is a plan view of FIG. 1(A).

[0041] A method for making a semiconductor device according to the first preferred embodiment of the present invention will be explained hereinafter with reference to these figures.

[0042] A flip chip configuration is used for the semiconductor device to obtain “a chip size package”.

[0043] Step (a)

[0044] First, a back surface 10 b of a silicon wafer 10 is fixed on an adhesive tape 12 (refer to FIG. 1(A)). The adhesive tape 12 has a heat resisting property. An edge portion of the adhesive tape 12 is fixed to a tool having a ring form, i.e., a wafer ring 14 (refer to FIG. 3)).

[0045] A plurality of silicon chip regions are formed on and arranged in a front surface 10 a of the silicon wafer 10. The front surface 10 a is also called “an active surface” or “an electric circuit surface”. Electric circuits (circuit patterns) are formed on each of the silicon chip regions. Electrodes for electrically coupling to an external device are formed on a periphery of each silicon chip region. The electrodes are comprised of, for example, pads (not shown in figures).

[0046] Step (b)

[0047] Next, bumps 22 are formed on the electrodes which are formed on the front surface 10 a of the silicon wafer 10, respectively (refer to FIG. (B)). That is, a bump bonding is applied to the electrodes by using a capillary. The bump 22 is made of, for example, a laminated layer Au/solder/tin or a laminated layer Sn/Pb. The bump 22 may be also made of, for example, Au or Sn.

[0048] Step (c)

[0049] The silicon wafer 10 is subjected to a dicing process. Thus, the silicon wafer 10 is separated into pieces of silicon chips 18. The silicon wafer 10 is separated at a predetermined position by using a dicing blade. Each of the separated silicon chips 18 has a predetermined size. The electric circuit, the electrode and the bump 22 are provided on the front surfaces 18 a of the respective silicon chips 18.

[0050] Step (d)

[0051] Next, the adhesive tape 12 is stretched so that distances between the silicon chips 18 increase (refer to FIG. 1 (D)). Since these distances become large, a wiring substrate 28 having a size which is relatively larger than that of the silicon chip 18 may be easily attached to the silicon chip 18 in the next step. The wiring substrate 28 is also called “a package substrate”.

[0052] Step (e)

[0053] Next, the adhesive tape 12 on which the silicon chips 18 are adhered is located on a bonding stage (not shown in FIG. 2(A)). Then, the wiring substrate 28 is transferred and positioned so that an internal terminal surface 28 a thereof faces the front surface 18 a of the corresponding silicon chip 18 by using a bonding tool 30. The wiring substrate 28 is made of, for example, a glass epoxy, a ceramic, a polyimide, or the like and has the size which is relatively larger than that of the silicon chip 18.

[0054] Next, internal electrodes formed on the internal terminal surface 28 a are aligned with the corresponding bumps 22. Thereafter, the wiring substrate 28 is compression-bonded to the silicon chip 18. That is, the wiring substrate 28 is attached to the silicon chip 18, or in other words the silicon chip 18 is mounted on the wiring substrate 18. As a result, a preliminary semiconductor device structure 38 (hereinafter a preliminary structure 38) is obtained which is defined by the silicon chip 18 and the wiring substrate 28 attached to the silicon chip 18.

[0055] Step (f)

[0056] Next, an adhesive tape 40 is adhered on external terminal surfaces 28 b of the wiring substrates 28. The adhesive tape 40 has a heat resisting property. Then, the adhesive tape 12 adhered on back surfaces 18 b of the silicon chips 18 is removed (refer to FIG. 2(B)). Therefore, the internal terminal surfaces 28 a of the wiring substrates 28 do not face any adhesive tapes and are exposed.

[0057] Step (g)

[0058] Next, as illustrated in FIG. 2(C), an appropriate amount of resin 34 is flowed into a space between the internal terminal surface 28 a of the wiring substrate 28 and the front surface 18 a of the silicon chip 18 by using a resin dispenser 32.

[0059] In this case, the resin 34 is flowed into the space from a periphery of the wiring substrate 28, wherein the periphery of the wiring substrate 28 is a region where the silicon chip 18 is not overlapped with the wiring substrate 28. The distance between an edge of the silicon chip 18 and an edge of the wiring substrate 28 is set in the range of 0.5 mm to 2.0 mm.

[0060] Thereafter, the resin 34 is hardened by applying heat.

[0061] As a result, the semiconductor device which is sealed with the resin 34 is obtained.

[0062] Thereafter, solder balls which function as external terminals may be formed on the external terminal surface 28 b of the wiring substrate 28 if necessary. Reliability for connecting the semiconductor device to a motherboard may be improved by providing the solder balls.

[0063] As described above, since the adhesive tape 40 is adhered to the wiring substrates 28 of the preliminary structures 38 in the process step (f) the preliminary structures 38 may be processed and transferred all at once.

[0064] In one of the conventional process steps, silicon chips are transferred to a bonding stage one by one and then a wiring substrate is connected to the silicon chip to obtain a preliminary structure. The first preferred embodiment of the present invention may avoid such individually transferring of the silicon chips. Therefore, a manufacturing time period and a manufacturing cost may be reduced.

Second Preferred Embodiment

[0065]FIG. 4 is a cross sectional view showing a semiconductor device according to a second preferred embodiment of the present invention.

[0066] The semiconductor device is made up of a silicon chip 18 and a wiring substrate 42. The size of the silicon chip 18 and the size of the wiring substrate 42 are substantially the same.

[0067] The silicon chip 18 has a front surface 18 a on which electrodes are formed. The wiring substrate 42 has an internal terminal surface 42 a on which internal electrodes are formed. The front surface 18 a and the internal terminal surface 42 a face each other. The electrodes of the silicon chip 18 are connected to the internal electrodes of the wiring substrate 42 through bumps 22.

[0068] A gap between the silicon chip 18 and the wiring substrate 42 is filled with a resin 34. Side surfaces of the silicon chip 18 and the wiring substrate 42 are covered with the resin 34. A back surface 18 b of the silicon chip 18 which is opposite to the front surface 18 a, and a external terminal surface 42 b of the wiring substrate 42 which is opposite to the internal terminal surface 42 a, are exposed.

[0069] Next, a method for manufacturing a semiconductor device according to a second preferred embodiment of the present invention will be explained hereinafter with reference to FIG. 5.

[0070]FIG. 5(A) through (C) are process diagrams showing a method for making a semiconductor device according to the second preferred embodiment of the present invention.

[0071] In the second preferred embodiment, steps (h) and (i) which are described below are executed after steps (a) through (e) (and if necessary, step (f) which are explained in the first preferred embodiment have been done.

[0072] Therefore, explanations with respect to the steps (a) through (f) are omitted here. However, wiring substrates 42 of the second preferred embodiment has a size which is different than that of the wiring substrates 28 of the first preferred embodiment.

[0073] Turning to FIG. 5(A), a state in which the steps (a) through (f) have been done is shown.

[0074] The external terminal surfaces 42 b of the wiring substrates 42 are adhered on the adhesive tape 40. The internal electrodes formed on the internal terminal surfaces 42 a of the wiring substrate 42 are connected to the electrodes formed on the front surfaces 18 a of the silicon chip 18 through the bumps 22.

[0075] This combination of the silicon chip 18 and the wiring substrate 42 attached to the silicon chip 18 is called a preliminary semiconductor device structure 44 (hereinafter a preliminary structure 44) throughout this embodiment. Furthermore, a state in which the preliminary structure 44 is attached on the adhesive tape 40 is called an intermediate semiconductor device structure 46 (hereinafter an intermediate structure 46) throughout this embodiment.

[0076] Step (h)

[0077] Next, as shown in FIG. 5(B), the intermediate structure 46 is held by an upper molding die 48 and a lower molding die 50.

[0078] The upper molding die 48 has a concave portion which has a rectangular parallelepiped shape or a wafer like shape. The lower molding die 50 has a board like configuration. A cavity 52 which is capable of housing the intermediate structure 46 is obtained by combining the upper molding die 48 with the lower molding die 50.

[0079] Next, the resin 34 is injected into the cavity 52 from a resin inject port 54 formed in the upper molding die 48.

[0080] Thereafter, the resin 34 is hardened by applying heat. When a resin having thermosetting property and quick harden property is used as the resin 34, such resin will harden in several tens of minutes.

[0081] As a result, the intermediate structure 46 which is sealed with the resin 34 is obtained (refer to FIG. 5(C)).

[0082] Step (i)

[0083] Next, device regions 56 each of which includes the preliminary structure 44 are defined.

[0084] Then, the intermediate structure 46 is subjected to dicing process so that each of the device regions 56 are cut out. The intermediate structure 46 is separated at a predetermined position by using a dicing blade. Thus, the intermediate structure 46 is separated into pieces of semiconductor devices. Each of the separated semiconductor devices has a predetermined size (refer to FIG. 5(C)).

[0085] As described above, since the resin sealing process is executed by using a molding die instead of the resin dispenser, all the preliminary structures 44 may be sealed with the resin at the same time. Therefore, a manufacturing time period may be sharply reduced.

[0086] Furthermore, since the wiring substrate 42 having a size which is substantially the same size as the silicon chip 18 may be used, it is possible to miniaturize the device. The size of the semiconductor device may be 1.0 mm to 1.6 mm smaller than that of the conventional semiconductor device.

[0087] Furthermore, since the dicing process is used for separating the intermediate structure 46, an outer dimension accuracy of the semiconductor device is improved to {fraction (1/10)} through {fraction (1/100)} of a normal value. (That is, a single dimension accuracy in a substrate manufacturer is ±0.005 mm, however, a dicing accuracy is ±0.005 mm.)

Third Preferred Embodiment

[0088]FIG. 6(A) and (D) are process diagrams showing a method for making a semiconductor device according to a third preferred embodiment of the present invention.

[0089] A method for making a semiconductor device according to the third preferred embodiment of the present invention will be explained hereinafter with reference to these figures.

[0090] Basically, process steps of the third preferred embodiment are the same as those of the second preferred embodiment. However, in the third preferred embodiment, protrusion structures 58 are provided on the upper molding die 48 a or lower molding die 50 in the cavity 52. The protrusion structures 56 are located at boundaries of device regions 56.

[0091]FIG. 6(A) shows a state in which the steps (a) through (h) of the second embodiment have been done.

[0092] As illustrated in FIG. 6(A), the intermediate structure 46 is held by the upper molding die 48 a and the lower molding die 50. The resin 34 is filled in the cavity 52 and is hardened. That is, the intermediate structure 46 which has been sealed with the resin 34 is shown in FIG. 6(A).

[0093] In this FIG. 6(A), the protrusion structures 58 is provided on the upper molding die 48 a. The protrusion structures 58 are formed at positions in which the preliminary structure 46 to be separated.

[0094] Next, when the upper molding die 48 a and the lower molding die 50 are removed from the preliminary structure 46, notches 60 have been formed on the surface of the preliminary structure 46. (The notch is also called “a trench”.) These notches 60 are formed along boundaries between the device regions 56 (refer to FIG. 6 (B)).

[0095] The intermediate structure 46 a may be manually separated along the notches by hand. This means that the intermediate structure 46 a is easily separated into the individual semiconductor devices after adhesive tape 40 is removed.

[0096] Furthermore, it is possible to reduce a manufacturing time period and a manufacturing cost.

[0097] Finally, the semiconductor device as shown in FIG. 4 is obtained.

Fourth Preferred Embodiment

[0098]FIG. 7 is a cross sectional view showing a semiconductor device according to a fourth preferred embodiment of the present invention.

[0099] The semiconductor device has a structure which is similar to that of the semiconductor device of the second preferred embodiment. The difference between the semiconductor device shown in FIG. 7 and the second preferred embodiment resides in the sides of the wiring substrate 42. That is, the sides of the wiring substrate 42 shown in FIG. 7 are not covered with the resin 34.

[0100]FIG. 8(A) through (C) are process diagrams showing a method for making a semiconductor device according to the fourth preferred embodiment of the present invention.

[0101] A method for making a semiconductor device according to the fourth preferred embodiment of the present invention will be explained hereinafter with reference to these figures.

[0102] First, bumps 22 are formed on electrodes which are provided on a front surface 10 a of a silicon wafer 10, respectively. The front surface 10 a is called also “an active surface” or “an electric circuit surface”.

[0103] Next, a wiring substrate 62 is located on a bonding stage 20 so that an internal terminal surface 62 a faces upward.

[0104] Then, the silicon wafer 10 having the bumps 22 formed thereon is transferred over to the bonding stage 20 by a bonding tool 30 so that the front surface 10 a faces the internal terminal surface 62 a.

[0105] Thereafter, the bumps 22 are compression-bonded to the internal terminals. That is, the wiring substrate 62 is attached to the silicon wafer 10, or in other words, the silicon wafer 10 is mounted on the wiring substrate 62.

[0106] As a result, an intermediate semiconductor device structure 64 (hereinafter an intermediate structure 64) is obtained which is defined by the silicon wafer 10 and the wiring substrate 62 attached to the silicon wafer 10 (refer to FIG. 8 (A)).

[0107] The wiring substrate 62 will be separated into individual wiring substrates 42 in a later process step. Therefore, regions for respective wiring substrates 42 are defined on the wiring substrate 62. The defined regions correspond to silicon chips 18 which will be obtained in the later separating process step.

[0108] Next, the intermediate structure 46 is held by an upper molding die 48 and a lower molding die 50. A resin 34 is flowed into a gap between the silicon wafer 10 and the wiring substrate 62 and then the resin 34 is hardened (refer to FIG. 8 (B)).

[0109] Thereafter, when the upper molding die 48 and the lower molding die 50 are removed, the intermediate structure 64 a which is sealed with the resin 34 is obtained.

[0110] Next, device regions 66 each of which includes the preliminary structure 44 are defined.

[0111] Then, the intermediate structure 64 a is subjected to dicing process so that each of the device regions 66 are cut out. The intermediate structure 64 a is separated at boundaries between the semiconductor regions 66 by using a dicing blade. Thus, the silicon wafer 10 is separated into pieces of semiconductor chips 18 and the wiring substrate 62 is separated into the wiring substrates 42. As a result, the semiconductor device as shown in FIG. 7 is obtained.

[0112] As described above, since the resin sealing process is executed by using a molding die instead of the resin dispenser, the resin may be flowed into the gap once. Therefore, a manufacturing time period may be sharply reduced.

[0113] Furthermore, since the wiring substrate 42 having a size which is substantially the same size of the silicon chip 18 may be used, it is possible to miniaturize the device.

[0114] The size of the semiconductor device may be 1.0 mm to 2.6 mm smaller than that of the conventional semiconductor device.

[0115] Furthermore, since the dicing process is used for separating the intermediate structure 64 a, an outer dimension accuracy of the semiconductor device is improved.

Fifth Preferred Embodiment

[0116] This embodiment relates to a method for separating the resin sealed intermediate structure 46 and 64 a as explained before (the second and the fourth preferred embodiment) into the semiconductor devices.

[0117] In this embodiment, a case of separating the intermediate structure 64 a into the semiconductor devices is explained as an example.

[0118]FIG. 9(A) is one of process diagrams showing a method for making a semiconductor device according to a fifth preferred embodiment of the present invention. That is, FIG. 9(A) is a cross sectional view showing the intermediate structure 64 a just after the intermediate structure 64 a is separated by a dicing blade.

[0119] In this embodiment, intervals between device regions 66 are set to distances which are substantially equal to dicing width 68 (cutting line 68). That is, the device regions 66 are separated by a distance from each other, wherein the distance is equal to the dicing width 68. Since most portions after dicing diced may be used for the semiconductor device, wasted portions between the device regions 64 which do not function semiconductor devices may be reduced.

[0120]FIG. 9(B) is a plan view showing the intermediate structure 64 a from the silicon wafer 10 side before dicing.

[0121] Each of the device regions 66 is arranged in a matrix form so that the device regions 66 are separated by the dicing width 68 (cutting line 68).

[0122] As described above, the device regions 66 are arranged at minimum intervals. Therefore, a lot of products may be yields from one silicon wafer 10.

[0123] Furthermore, since it is not necessary to remove the wasted portions, manufacturing steps may be reduced.

Sixth Preferred Embodiment

[0124] This embodiment relates to a method of sealing the intermediate structure 64 in the fourth preferred embodiment.

[0125] In this embodiment, when the intermediate structure 64 is sealed with the resin, a resin structure 70 is also formed on the external terminal surface 62 b of the wiring substrate 62.

[0126]FIG. 10(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 b.

[0127]FIG. 10(B) is a cross sectional view of the semiconductor device of FIG. 10(A) taken along the line 10-10′. However, in FIG. 10(B), the resin (such as resin 34 of FIG. 8(B)) formed on the internal terminal surface 62 a of the wiring substrate 62 and the silicon wafer (such as wafer 10 of FIG. 8(B)) bonded to the internal electrodes of the wiring substrate 62 through the bumps 22 are illustrated together as a resin forming part 72.

[0128] Now, assuming that a resin deposition structure such as the resin forming part 72 is formed on only one side of the wiring substrate 62.

[0129] In a resin seal step, the resin of high temperature is flowed onto the internal terminal surface 62 a. After that, contraction stress occurs during the resin is cooled to room temperature. The wiring substrate 62 is bent by the contraction stress. (The shape of the wiring substrate is changed.)

[0130] As explained above, there is a possibility that the wiring substrate 62 is bent if the resin 34 is formed on only one side of the wiring substrate 62.

[0131] In this preferred embodiment, a resin structure 70 is also formed on the external terminal surface 62 b when the resin seal step is executed. Therefore, the contraction stress described above may be canceled and thus the wiring substrate 62 is not bent.

[0132] Furthermore, the resin structure 70 has a frame structure which surrounds the resin forming part 72. Since the width and the thickness of the frame structure is set to an appropriate value, the contraction stress is called out.

Seventh Preferred Embodiment

[0133] Like the sixth embodiment, this seventh embodiment relates to a method for sealing the intermediate structure 64 in the fourth preferred embodiment.

[0134] The seventh embodiment differs from the sixth in that the a resin structure 70 a has a lattice configuration.

[0135]FIG. 11(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 c.

[0136]FIG. 11(B) is a cross sectional view of the semiconductor device of FIG. 11(A) taken along the line 11-11′.

[0137] As illustrated in FIG. 11(A) and (B), the external terminal surface 62 b is divided into four regions by the resin structure 70 a having the lattice configuration. This means that the frame strength increases. Therefore, a high stress cancellation effect is obtained. Furthermore, this structure also may reinforce the intermediate structure 64 c.

[0138] The shape of the resin structure 70 a is not limited to this structure. Other shapes may be applied to the resin structure 70 a.

Eighth Preferred embodiment

[0139] This embodiment also relates to a method for sealing the intermediate structure 64 in the fourth preferred embodiment.

[0140] In this embodiment, the resin structure 70 b is formed outside of the resin forming part 72.

[0141]FIG. 12(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 d.

[0142]FIG. 12(B) is a cross sectional view of the semiconductor device of FIG. 12(A) taken along the line 12-12′.

[0143] As illustrated in FIG. 12(A) and (B), the resin structure 70 b is formed at a position which surrounds the resin forming part 72. Therefore, a maximum region which is used for formation of the semiconductor devices may be obtained.

Ninth Preferred Embodiment

[0144] This embodiment relates to a method for separating the intermediate structure 64 in the fourth preferred embodiment.

[0145] In the sixth thorough the eighth embodiments, a variety of resin structures 70 are formed during the resin seal step. However, the resin structure 70 must be removed from a product region 78 before a resin sealed intermediate structure 64 e is separated into the semiconductor devices. Therefore, in the ninth preferred embodiment, a notch 74 is formed on the resin forming part 72 and a notch 76 is formed on the wiring substrate 62. The notches 74 and 76 are located at just inside of the resin structure 70.

[0146]FIG. 13(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 e.

[0147]FIG. 13(3) is a cross sectional view of the semiconductor device of FIG. 13(A) taken along the line 13-13′.

[0148] As illustrated in FIG. 13(A), the notch 76 having V shape cross section is formed at just inside the resin structure 70 on the wiring substrate 62. The notch 76 is formed along the inside of the resin structure 70.

[0149] The notch 74 having V shape cross section is formed on the resin structure 72 which is opposite to the notch 76.

[0150] Since the notches 74 and 76 are provided, the product region 78 which includes device regions 66 may be easily separated from the resin structure 70 by using, for example, a press machine.

[0151] The cross section shape of the notch may also be U shaped.

Tenth Preferred Embodiment

[0152] This embodiment relates to a notch for separating the product region 78 from the resin structure 70.

[0153]FIG. 14(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 f.

[0154]FIG. 14(B) is a cross sectional view of the semiconductor device of FIG. 14(A) taken along the line 14-14′.

[0155] As illustrated in FIG. 14(A) and (B), the notch 76 a having V shape cross section is formed at just inside the resin structure 70 on the wiring substrate 62. The notch 76 a is also formed so as to extend to edges of the wiring substrate 70.

[0156] The notch 74 a having V shape cross section is formed on the resin structure 72 which is opposite to the notch 76 a.

[0157] Since the notches 74 a and 76 a are provided, the product region 78 may be easily separated from the resin structure 70 using a relatively small force such as by hand.

[0158] The cross section shape of the notch may also be U shaped.

Eleventh Preferred Embodiment

[0159] This embodiment relates to a slit for separating the product region 78 from the resin structure 70 b.

[0160]FIG. 15(A) is a plan view from the external terminal surface 62 b side, which shows the resin sealed intermediate structure 64 g.

[0161]FIG. 15(B) is a cross sectional view of the semiconductor device of FIG. 145(A) taken along the line 15-15′.

[0162] As illustrated in FIG. 15(A) and (B), slits 80 passing through the wiring substrate 62 are formed inside the resin structure 70 b. Each of the slits 80 is formed along a corresponding one of inner sides of the resin structure 70 b.

[0163] Since the slits 80 are provided in the wiring substrate 62 b, the product region 78 may be easily and accurately separated from the resin structure 70 b.

[0164] The slits 80 are not limited to such these particular patterns. A plurality of slits which are formed along corresponding ones of inner sides of the resin structure 70 b may be applicable to this embodiment.

[0165] As described above, since the adhesive tape is adhered to the wiring substrates of the preliminary structures, the preliminary structures may be processed and transferred all at once.

[0166] In one of conventional process steps, silicon chips are transferred to a bonding stage one by one and then a wiring substrate is connected to the silicon chip to obtain a preliminary structure. The present invention may avoid such individual transferring of the silicon chips. Therefore, a manufacturing time period and a manufacturing cost may be reduced.

[0167] While the preferred form of the present invention has been described, it is to be understood that modifications will be apparent to those skilled in the art without departing from the spirit of the invention.

[0168] The scope of the invention, therefore, is to be determined solely by the following claims. 

What is claimed is:
 1. A method for making a semiconductor device, comprising: attaching a first adhesive tape onto a first major surface of a semiconductor wafer, wherein the semiconductor wafer has a plurality of semiconductor chip regions; forming protrusion electrodes on a second major surface of the semiconductor wafer within the plurality of semiconductor chip regions; removing portions of the semiconductor wafer located between the plurality of semiconductor chip regions to form a plurality of semiconductor chips; expanding intervals between the semiconductor chips; coupling respective first major surfaces of wiring substrates to corresponding second major surfaces of the semiconductor chips by the protrusion electrodes; attaching a second adhesive tape onto second major surfaces of the wiring substrates; removing the first adhesive tape from the semiconductor chips; applying a resin to gaps between the semiconductor chips and the wiring substrates; and removing the second adhesive tape from the wiring substrates.
 2. A method as claimed in claim 1, wherein said expanding intervals includes stretching the first adhesive tape.
 3. A method for making a semiconductor device, comprising: attaching a first adhesive tape onto a first major surface of a semiconductor wafer, wherein the semiconductor wafer has a plurality of semiconductor chip regions; forming protrusion electrodes on a second major surface of the semiconductor wafer within the plurality of semiconductor chip regions; removing portions of the semiconductor wafer located between the plurality of semiconductor chip regions to form a plurality of semiconductor chips; expanding intervals between the semiconductor chips; coupling respective first major surfaces of wiring substrates to corresponding second major surfaces of the semiconductor chips by the protrusion electrodes; attaching a second adhesive tape onto second major surfaces of the wiring substrates; removing the first adhesive tape from the semiconductor chips; placing the semiconductor chips, the wiring substrates, and the second adhesive tape within a cavity of a molding die; applying a resin into the cavity to seal the semiconductor chips and the wiring substrates with the resin; removing the molding die; removing portions of the resin located between the semiconductor chips; and removing the second adhesive tape from the wiring substrates.
 4. A method as claimed in claim 3, wherein said expanding intervals includes stretching the first adhesive tape.
 5. A method as claimed in claim 3, the cavity has protrusions, and wherein the semiconductor chips are positioned within the cavity such that the protrusions are located at regions between the semiconductor chips.
 6. A method as claimed in claim 3, the cavity has protrusions, and wherein the semiconductor chips are positioned within the cavity such that the protrusions are located at regions between the wiring substrate.
 7. A method for making a semiconductor device, comprising: providing a semiconductor wafer having a plurality of semiconductor chip regions formed on a first major surface thereof; forming protrusion electrodes on the first major surface of the semiconductor wafer within the plurality of semiconductor chip regions; providing a wiring substrate having a plurality of device regions formed on a first major surface thereof, wherein the device regions correspond to the semiconductor chip regions respectively; coupling a first major surface of the wiring substrate to the second major surface of the semiconductor wafer by the protrusion electrodes so that each of the semiconductor chip regions aligns with a corresponding device region; placing the semiconductor wafer and the wiring substrate in a cavity of a molding die; applying a resin into the cavity to fill a gap between the semiconductor wafer and the wiring substrate; removing the molding die; and removing portions of the semiconductor wafer, the wiring substrate, and the resin which are located between the semiconductor chip regions.
 8. A method as claimed in claim 7, wherein said applying a resin includes forming a resin structure on a second major surface of the wiring substrate which opposes to the first major surface of the wiring substrate.
 9. A method as claimed in claim 8, wherein the resin structure is formed so as to have a frame shape.
 10. A method as claimed in claim 9, wherein the resin structure is formed at a periphery of the wiring substrate.
 11. A method as claimed in claim 8, wherein the resin structure is formed so as to have a lattice configuration.
 12. A method for making a semiconductor device, comprising: providing a semiconductor wafer having a plurality of semiconductor chip regions formed on a first major surface thereof; forming protrusion electrodes on the first major surface of the semiconductor wafer within the plurality of semiconductor chip regions; providing a wiring substrate having a plurality of device regions formed on a first major surface thereof and a notch, wherein the device regions correspond to the semiconductor chip regions respectively, and wherein the notch is formed on a second major surface thereof so as to surround the device regions; coupling a first major surface of the wiring substrate to the second major surface of the semiconductor wafer by the protrusion electrodes so that each of the semiconductor chip regions aligns with the corresponding device regions; placing the semiconductor wafer and the wiring substrate in a cavity of a molding die; applying a resin into the cavity to fill a gap between the semiconductor wafer and the wiring substrate; forming a resin structure outside the notch on the second major surface of the wiring substrate; removing the molding die; separating the device regions and the semiconductor regions form the resin structure by utilizing the notch; removing portions of the semiconductor wafer, the wiring substrate, and the resin which are located between the semiconductor chip regions.
 13. A method for making a semiconductor device, comprising: providing a semiconductor wafer having a plurality of semiconductor chip regions formed on a first major surface thereof; forming protrusion electrodes on the first major surface of the semiconductor wafer within the plurality of semiconductor chip regions; providing a wiring substrate having a plurality of device regions formed on a first major surface thereof and slits, wherein the device regions correspond to the semiconductor chip regions respectively, and wherein the slits are formed so as to surround the device regions; coupling a first major surface of the wiring substrate to the second major surface of the semiconductor wafer by the protrusion electrodes so that each of the semiconductor chip regions aligns with the corresponding device regions; placing the semiconductor wafer and the wiring substrate in a cavity of a molding die; applying a resin into the cavity to fill a gap between the semiconductor wafer and the wiring substrate; forming a resin structure outside the slits on a second major surface of the wiring substrate; removing the molding die; separating the device regions and the semiconductor regions form the resin structure by utilizing the slits; removing portions of the semiconductor wafer, the wiring substrate, and the resin which are located between the semiconductor chip regions. 